%0 Journal Article
%T Integration of SRO/PZT/SRO/Ni-Al/Cu/Ni-Al/SiO2/Si ferroelectric capacitor with copper<br>含铜铁电电容器SrRuO3/Pb(Zr0.4Ti0.6)O3/SrRuO3/Ni-Al/Cu/Ni-Al/SiO2/Si异质结的研究
%A Chen Jian-Hui
%A Liu Bao-Ting
%A Zhao Qing-Xun
%A Cui Yong-Liang
%A Zhao Dong-Yue
%A Guo Zhe
%A <br>陈剑辉
%A 刘保亭
%A 赵庆勋
%A 崔永亮
%A 赵冬月
%A 郭哲
%J 物理学报
%D 2011
%I 
%X 应用磁控溅射法以Ni-Al同时作为Cu与SiO2/Si,Cu与SRO薄膜之间的阻挡层材料,将Cu与SiO2/Si衬底和氧化物薄膜电极隔离,避免它们在高温氧气氛中发生化学反应和互扩散,实现了Cu薄膜与氧化物铁电电容器的集成.采用X射线衍射仪(XRD)和原子力显微镜(AFM)研究了不同温度下快速退火的SrRuO3(SRO)/Ni-Al/Cu/Ni-Al/SiO2/Si含Cu异质结的微结构和表面形貌,结果发现SRO/Ni-A
%K copper
%K PZT
%K ferroelectric capacitor
%K Ni-Al<br>Cu
%K PZT
%K 铁电电容器
%K Ni-Al
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=7FB288757ED284A0D577526499F0DA9C&yid=9377ED8094509821&vid=BFE7933E5EEA150D&iid=708DD6B15D2464E8&sid=74426BE940DBD57A&eid=74426BE940DBD57A&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=16