%0 Journal Article
%T Microstructure and mechanical properties of Ti-B-C-N nanocomposite coatings<br>Ti-B-C-N纳米复合薄膜结构及力学性能研究
%A Luo Qing-Hong
%A Lu Yong-Hao
%A Lou Yan-Zhi
%A <br>罗庆洪
%A 陆永浩
%A 娄艳芝
%J 物理学报
%D 2011
%I 
%X Ti-B-C-N nanocomposite coatings with different C quantities are deposited on Si(100) and high speed steel (W18Cr4V) substrates by the closed-field unbalanced reactive magnetron sputtering in the mixture of argon, nitrogen and acetylene gases. The microstructures of Ti-B-C-N nanocomposite coatings are characterized by X-ray diffraction and high-resolution transmission electron microscopy; while the nanohardness and elastic modulus values are measured by the nano-indention method. The results indicate that in the studied composition range, the deposited Ti-B-C-N nanocomposite coatings are found still only in the TiN base nanocrystalline. When the C2H2 flux is small, adding C can promote crystallization of Ti-B-C-N nanocomposite coatings, and the grain can be increased to improve the mechanical properties, when the grain size of about 6 nm (C2H2 flux rate 2 cm3/min), hardness, elastic modulus and fracture toughness of Ti-B-C-N nanocomposite coatings achieve the maximum, respectively, 35.7 GPa, 363.1 GPa and 2.46 MPa ·m1/2; the further increase of the C content of Ti-B-C-N nanocomposite coating can reduce mechanical properties of coating dramatically.
%K Ti-B-C-N films
%K magnetron sputtering
%K microstructure
%K mechanical properties<br>Ti-B-C-N薄膜
%K 磁控溅射
%K 微观结构
%K 力学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=7FF6FFF8EEC3AE33D4FB8527EF6586EE&yid=9377ED8094509821&vid=BFE7933E5EEA150D&iid=5D311CA918CA9A03&sid=B45F53C8DB8E4C4D&eid=BA305A52E2EE9350&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=17