%0 Journal Article
%T Effect of copper precipitation on the formation of denuded zone in Czchralski silicon<br>铜沉淀对直拉硅单晶中洁净区形成的影响
%A Wang Yong-Zhi
%A Xu Jin
%A Wang Na-Ting
%A Ji Chuan
%A Zhang Guang-Chao
%A <br>王永志
%A 徐进
%A 王娜婷
%A 吉川
%A 张光超
%J 物理学报
%D 2012
%I 
%X The influence of copper precipitation on the formation of denuded zone (DZ) in Czochralski silicon has been systematically investigated by means of optical microscopy. It was found that, for conventional furnace high-low-high annealing, the copper precipitates colonies generated along the whole crosssection in the specimens contaminated by copper impurity at the first step of the heat treatment, thus no DZ generated. While in other specimens, DZ formed. Additionally, it was found that the contamination temperature can influence significantly the thermodynamics and kinetic process of the formation of copper precipitates. The phenomena also occurred in the specimens underwent rapid thermal-low-high annealing. On the basis of the step by step investigation, it was revealed that the copper precipitates temperature and point defects type can influence the formation of DZ to a great extent.
%K Czchralski silicon
%K copper precipitation
%K denuded zone<br>直拉单晶硅
%K 铜沉淀
%K 洁净区
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=9903A07B9322879AE4C122F1C6D85AD5&yid=99E9153A83D4CB11&vid=1D0FA33DA02ABACD&iid=CA4FD0336C81A37A&sid=7C7395D2DC9F1651&eid=7C7395D2DC9F1651&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=32