%0 Journal Article
%T Numerical simulation of direct current method of measuring thermal conductivities of thin films<br>直流法测试薄膜热导的数值模拟研究
%A Li Wei-Zhi
%A Wang Jun
%A <br>黎威志
%A 王军
%J 物理学报
%D 2012
%I 
%X Thermal conductivity is one of the most important physical properties of thin films.Different from two-or three-dimensional measurement structures in most reports,in this work,one-dimensional(1D) two-end supported cantilever beam is provided.The structure of cantilever includes a metal heater(which also serves as a thermometer) and thin film(s) underneath for measurement. 1D heat flow equation is employed to obtain the expression of temperature rise distribution(△T(x) along the cantilever beam and voltage drop changes along the heater(△U) when a direct current(DC) follows in the heater.To confirm the correctness of theoretical deduction,ANSYS finite element software is employed to simulate△T(x) and△U.Results demonstrate that the simulations are in good agreement with the theoretic calculations obtained from expressions of△T(x) and△U.Compared with conventional 3-times frequency(3ω) method,the DC method with 1D cantilever beam is relatively simple and accurate.
%K heat transfer
%K thermal conductivities of thin films
%K ANSYS<br>热传导
%K 薄膜热导率
%K ANSYS
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=78F360FC29C47911FB8C876B7891F5AB&yid=99E9153A83D4CB11&vid=1D0FA33DA02ABACD&iid=708DD6B15D2464E8&sid=26011E8578FFE5F3&eid=26011E8578FFE5F3&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=21