%0 Journal Article
%T Study on fabrication and optical properties of Ge-Sb-Se thin films<br>Ge-Sb-Se硫系薄膜制备及光学特性研究
%A Zhang Wei
%A Chen Yu
%A Fu Jing
%A Chen Fei-Fei
%A Shen Xiang
%A Dai Shi-Xun
%A Lin Chang-Gui
%A Xu Tie-Feng
%A <br>张巍
%A 陈昱
%A 付晶
%A 陈飞飞
%A 沈祥
%A 戴世勋
%A 林常规
%A 徐铁峰
%J 物理学报
%D 2012
%I 
%X Several methods of fabricating chalcogenide thin films are introduced. In this paper, thermal evaporation and radio frequency methods are used to fabricate Ge-Sb-Se thin films. The thicknesses and roughnesses of the films are measured by surface profile-meter. The film growth rates are calculated. The component difference between film and target material is tested by X-ray photoelectron spectroscopy. The third-order optical nonlinearity and the transmission spectra of films fabricated by thermal evaporation are investigated using femto-second Z-scan method and spectrophotometer, to obtain the values of nonlinear refraction, nonlinear absorption and thickness of films. The results show that the films fabricated by thermal evaporation have excellent physical structures and optical properties, and possess promising potential applications in integrated optical devices.
%K chalcogenide glasses
%K chalcogenide thin films
%K thermal evaporation
%K optical properties<br>硫系玻璃
%K 硫系薄膜
%K 热蒸发法
%K 光学特性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=9B2BCA8CA9CB30DF73C3B9E90F411B3F&yid=99E9153A83D4CB11&vid=1D0FA33DA02ABACD&iid=94C357A881DFC066&sid=63A892F0B367FB40&eid=63A892F0B367FB40&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=23