%0 Journal Article
%T Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometer<br>用于微型光谱仪的硅基多级微反射镜设计与制作研究木
%A 王波
%A 梁中翥
%A 孔延梅
%A 梁静秋
%A 付建国
%A 郑莹
%A 朱万彬
%A 吕金光
%A 王维彪
%A 裴舒
%A 张军
%J 物理学报
%D 2010
%I 
%X A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed,and the interference system is introduced. The fabrication of the micro multi-mirrors,which is the core part of the system,is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes (111) through wet etching is less than 10 nm.
%K Fourier transform spectrometer
%K micro multi-mirror
%K micro-opto-electro-mechanical system
%K space modulation<br>傅里叶变换光谱仪，
%K 多级微反射镜，
%K 微光机电系统，
%K 空间调制
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=FB23242285DA3F2B5CAFC2900D122DC1&yid=140ECF96957D60B2&vid=6AC2A205FBB0EF23&iid=0B39A22176CE99FB&sid=3382A18868551611&eid=F434A3C2A19884E7&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0