%0 Journal Article
%T Hetero-structure coherent epitaxial growth in AlN/NbN nano-structured multilayers<br>AlN/NbN纳米结构多层膜的共格异结构外延生长研究
%A Yu Li-Hu
%A Xue An-Jun
%A Dong Song-Tao
%A Xu Jun-Hua
%A <br>喻利花
%A 薛安俊
%A 董松涛
%A 许俊华
%J 物理学报
%D 2010
%I 
%X Monolithic AlN,NbN films and AlN/NbN multilayers with different modulation periods were prepared by reactive magnetic sputtering. The films were characterized by X-ray diffraction, X-ray reflectivity and high-resolution transmission electron microscopy. The results showed that the crystal structure of monolithic AlN and NbN films is close-packed hexagonal (hcp) and face-centered cubic (fcc), respectively. The crystal structure of AlN and NbN is hcp and fcc, respectively, in AlN/NbN multilayers. The interfaces between AlN layers and NbN layers are coherent, i.e., c-NbN (111)//h-AlN(0002). The lattice mismatch of AlN/NbN multilayers is 0.13%. The thermodynamic calculation revealed that no matter how thickness of AlN or NbN layer is, the AlN layer does not form nonequilibrium structure of fcc, but the equilibrium structure of hcp. The AlN layers grow in the way of hetero-epitaxial coherent growth with NbN layers.
%K AlN/NbN nano-structured multilayers
%K coherent epitaxial growth
%K hetero-structure<br>AlN/NbN纳米结构多层膜
%K 共格外延生长
%K 异结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=E0D3D27A7AC174993E522FDAD6822947&yid=140ECF96957D60B2&vid=6AC2A205FBB0EF23&iid=B31275AF3241DB2D&sid=408622421E43C317&eid=D87166E0C1014643&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=32