%0 Journal Article
%T Synthesizing a kind of controllable nanopillar arrays<br>一种可控纳米柱阵列的研制
%A Li Qiang
%A Wang Kai-Ge
%A Dang Wei-Jun
%A Hui Dan
%A Ren Zhao-Yu
%A Bai Jin-Tao
%A <br>李强
%A 王凯歌
%A 党维军
%A 惠丹
%A 任兆玉
%A 白晋涛
%J 物理学报
%D 2010
%I 
%X On the basis of the first oxide prepared anodized aluminum oxide template (AAO), the second, third and fourth oxidation preparation are implemented in turn. Then, the surface morphology and current curve changes of the AAO template with multiple oxidation preparation were compared and analyzed systemically. The apertures of nanopore made by the second, third and forth oxidation increase in order, the intervals between neighboring apertures reduce. However, the scale of ordered distribution of nanopores on the whole template surface does not change significantly. Then, carefully controlling the working conditions for the membrane-removed of the one-step oxidation AAO, the nanoporous with regular apertures and highly ordered was obtained after getting rid of the top oxidation layer about 10 minutes. Finally, based on those prepared AAO templates, integrated with the thermal nanoimprint lithography, we achieved the PMMA nano-pillar arrays with controllable lengths and diameters.
%K nanopillar arrays
%K PMMA
%K anodized aluminum oxide
%K multi-step anodizations<br>纳米柱阵列
%K 聚甲基丙烯酸甲酯
%K 多孔氧化铝模板
%K 多次氧化法
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=1778E63DE3D915EFCD3BA616109EA583&yid=140ECF96957D60B2&vid=6AC2A205FBB0EF23&iid=5D311CA918CA9A03&sid=93731F027BFAB27B&eid=9DF00E57996F9505&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=18