%0 Journal Article
%T Effect of N2 partial pressure on the defect properties and mechanical behaviors of nanoscale ZrN/WN multilayers<br>N2分压对ZrN/WN纳米多层膜缺陷性质与力学性能的影响
%A Wang Li-Qun
%A Wang Ming-Xi
%A Li De-Jun
%A Yang Jin
%A Yu Da-Shu
%A Su Jie
%A <br>王立群
%A 王明霞
%A 李德军
%A 杨 瑾
%A 余大书
%A 宿 杰
%J 物理学报
%D 2007
%I 
%X ZrN/WN nanoscale multilayer coatings were synthesized with different N2 partial pressure by radio frequency magnetron sputtering. The vacancy-defect properties were measured by slow positron annihilation, and mechanical behaviors were studied using nanoindentation. The results indicate that the multilayer coating with N2 partial pressure of 0.4 Pa has the lowest concentration of vacancy-defects, and the average S-parameters of the central and the combination layers are 0.4402 and 0.4641, respectively. Lower or higher N2 partial pressure results in an increase in vacancy-defect concentration. With vacancy-defect concentration decreasing, the hardness and critical load of multilayer coatings increase. The multilayer coating with lowest concentration of vacancy-defects also exhibits maximum hardness and critical load (34.8 GPa and 100 mN). The decrease of vacancy-defect concentration is helpful to improve the mechanical properfies of multilayer coatings.
%K nanoscale ZrN/WN multilayers
%K defects properties
%K mechanical behaviors
%K slow positron annihilation<br>ZrN/WN纳米多层膜，
%K 缺陷性质，
%K 力学性能，
%K 慢正电子湮没
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=BA387B27DA1D1100&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=B31275AF3241DB2D&sid=B5E105B6253708A3&eid=CE87922D9251BE78&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=12