%0 Journal Article
%T Fabrication of superconducting nanowire single-photon detector<br>超导纳米线单光子探测器
%A Zhang La-Bao
%A Kang Lin
%A Chen Jian
%A Zhao Qing-Yuan
%A Jia Tao
%A Xu Wei-Wei
%A Cao Chun-Hai
%A Jin Biao-Bing
%A Wu Pei-Heng
%A <br>张蜡宝
%A 康琳
%A 陈健
%A 赵清源
%A 郏涛
%A 许伟伟
%A 曹春海
%A 金飚兵
%A 吴培亨
%J 物理学报
%D 2011
%I 
%X In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.
%K single photon
%K niobium nitride
%K nanowire
%K detector<br>单光子
%K 氮化铌
%K 纳米线
%K 探测器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=4D2E71D71071B86EA9323F7894D178B0&yid=9377ED8094509821&vid=BFE7933E5EEA150D&iid=38B194292C032A66&sid=1BCF217DFACFBD61&eid=6920A1020E13BE87&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=30