%0 Journal Article
%T Diffraction property of multi-layer dielectric gratings studied by rigorous coupled-wave analysis<br>基于严格耦合波理论的多层介质膜光栅衍射特性分析
%A Kong Wei-Jin
%A Yun Mao-Jin
%A Sun Xin
%A Liu Jun-Hai
%A Fan Zheng-Xiu
%A Shao Jian-Da
%A <br>孔伟金
%A 云茂金
%A 孙欣
%A 刘均海
%A 范正修
%A 邵建达
%J 物理学报
%D 2008
%I 
%X The rigorous coupled-wave analysis technique for describing the diffraction of multi-layer diffraction grating (MDG) is put forward. Formulations for a stable and efficient numerical implementation of diffraction efficiency are presented for MDG for TE polarization and Littrow angle. With the merit function of the -1 order diffraction efficiency higher than 96%, the parameters of MDG are optimized for HfO2 and SiO2 top layers, respectively. Numerical calculation indicates that a larger grating parameter range can be obtained with HfO2 rather than the SiO2 on the top. The manufacture tolerance and the effective incident angle for the optimized structure of MDG are discussed in the end.
%K 衍射效率，
%K 多层介质膜光栅，
%K 严格耦合波理论
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=DBA5295F4D1E8C56FCD263A7161526AD&yid=67289AFF6305E306&vid=11B4E5CC8CDD3201&iid=5D311CA918CA9A03&sid=D8594BC5A64909EB&eid=EF35425A4EEBADA4&journal_id=1000-3290&journal_name=物理学报&referenced_num=2&reference_num=16