%0 Journal Article
%T Fractal character of noise in electromigration in metel interconnection<br>金属互连电迁移噪声的分形特征
%A Chen Chun-Xi
%A Du Lei
%A He Liang
%A Hu Jin
%A Huang Xiao-Jun
%A Wei Tao
%A <br>陈春霞
%A 杜 磊
%A 何 亮
%A 胡 瑾
%A 黄小君
%A 卫 涛
%J 物理学报
%D 2007
%I 
%X Based on fractal theory , through the fractal dimension of electro-diffusion, the dimensions of noise time series and grain boundary are corelated. The change of noise dimension is shown to be useful for studying the damage mechanism and determining the parameters for electromigration. The picture of grain boundary becomes complicated in the early period of electromigration, but after the voids are informed, it becomes more regular. So the fractal dimension of time series increases during the early stage of electromigration and goes down after the voids are informed. The theoretical analysis is confirmed by experiment, the dimension of noise time series may be a new characteristic parameter for metallic interconnection electromigration.
%K electromigration
%K metallic interconnection
%K fractal<br>电迁移
%K 金属互连
%K 分形
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=1A7F80CA21754FB4ECB1FB51F8C3ED2B&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=708DD6B15D2464E8&sid=44307D3D40F8098C&eid=628D4E04451A4D34&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=22