%0 Journal Article
%T The influence of distribution of Na+-dopant on the structure and dielectric properties of Ba0.25Sr0.75TiO3 thin film<br>杂质分布设计对钛酸锶钡薄膜结构和性能的影响
%A Zhou Qi-Gang
%A Zhai Ji-Wei
%A Yao Xi
%A <br>周歧刚
%A 翟继卫
%A 姚熹
%J 物理学报
%D 2007
%I 
%X Na+-doped and compositional graded doped Ba0.25Sr0.75TiO3 thin films were grown on Pt/Ti/SiO2/Si substrates by Sol-Gel technique. The dielectric properties of thin films were investigated as a function of Na+ doping level. It is revealed that with the increase of Na+ concentrations both the dielectric constant and the loss decrease continuously while the leakage current initially decreases (Na+< 2.5mol%) and then increases. The increase of leakage current may be caused by the formation of porous structure which was confirmed by field emission scanning microscopy (FE-SEM). The improvement of overall dielectric properties were achieved by using the compositional graded doping which results in a better microstructure in the film.
%K BST thin film
%K doping
%K sol-gel technique
%K dielectric property<br>钛酸锶钡薄膜
%K 掺杂
%K 溶胶-凝胶方法
%K 介电性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=1A7F80CA21754FB41A63E3F06F9D4436&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=708DD6B15D2464E8&sid=EEFB552888F0569D&eid=BAA7CF02C417B835&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=24