%0 Journal Article
%T Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N2 discharge<br>射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究
%A Gao Fei
%A Mao Ming
%A Ding Zhen-Feng
%A Wang You-Nian
%A <br>高 飞
%A 毛 明
%A 丁振峰
%A 王友年
%J 物理学报
%D 2008
%I 
%X In this article we use the Langmuir probe and kinetic model to study the electron energy distribution function (EEDF), the electron temperature, and the electronic density in the radio-frequency inductively coupled plasma of Ar-N2 discharge. It has been found that, with the increase of the N2 flow, the EEDF varies from the bi-temperature distribution to the tri-temperature distribution; the electron temperature drops monotonically at low pressures (p<1.3 Pa), while it first increases and then drops at high pressures (p>1.3 Pa). In addition, due to the recombination of electrons and nitrogen molecular ions, the electron density drops substantially at high pressures when a small amount of N2 is added to the gas mixture. Although the theoretically obtained electron temperature is high than the experimentally measured one, the theoretical model presents good predictions of the influences of N2 ratio in Ar-N2 mixture on the electron temperature and EEDF.
%K inductively coupled plasma
%K Ar-N2 discharge
%K electron energy distribution
%K Langmuir probe<br>感应耦合等离子体，
%K Ar-N2混合气体放电，
%K 电子能量分布，
%K Langmuir探针
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=E4DB45CCFC8BD7F0647D09BB1AE78428&yid=67289AFF6305E306&vid=11B4E5CC8CDD3201&iid=5D311CA918CA9A03&sid=50F6D27E26B9B17D&eid=9F043402B364B471&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0