%0 Journal Article
%T The preliminary result of laser-focused Cr atomic deposition for fabricating nanostructure
激光驻波场形成Cr原子沉积纳米光栅的初步实验研究
%A Ma Yan
%A Zhang Bao-Wu
%A Zheng Cun-Lan
%A MA Shan-Shan
%A Li Fo-Sheng
%A Wang Zhan-Shan
%A Li Tong-Bao
%A
马艳
%A 张宝武
%A 郑春兰
%A 马珊珊
%A 李佛生
%A 王占山
%A 李同保
%J 物理学报
%D 2007
%I
%X The technology of laser-focused atomic deposition can be used to develop the nanostrucrure transfer standard of length. When the frequency of laser standing wave is higher than the resonant frequency of atoms, the atoms will be focused on the wave node of the standing wave. The collimated Cr atoms are focused by a standing-wave laser field as they are deposited on a silicon substrate. Atomic force microscopy measurements shows a spacing of 215nm.
%K laser dipole force
%K nanometrology
%K atoms deposition
%K blue detuning
激光偶极力
%K 纳米计量
%K 原子沉积
%K 蓝失谐
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=64148737311A4313&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=38B194292C032A66&sid=995E04834DE9F169&eid=01471B003B2963CC&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=15