%0 Journal Article
%T Influences of flux and interruption on InAs/GaAs quantum dot superlattice growth<br>沉积速率和生长停顿对InAs/GaAs量子点超晶格生长影响的综合分析
%A Song Yu-Xin
%A Yu Zhong-Yuan
%A Liu Yu-Min
%A <br>宋禹忻
%A 俞重远
%A 刘玉敏
%J 物理学报
%D 2008
%I 
%X Kinetic Monte Carlo simulations are applied to study the growth of self-assembled vertical ordering InAs quantum dot superlattice on GaAs substrate. The study is focused on the influences of flux and interruption time at the initial stage when the first sub-monolayer is forming on the wetting layer. We demonstrate that uniform sized and regularly ordered island arrays can be obtained by controlling flux and interruption time, by means of studying the surface morphology, average island size, island size distribution and the standard deviation of island size distribution comprehensively. The size and order of island arrays will greatly affect the location and size of quantum dots in subsequent three-dimensional growth.
%K kinetic Monte Carlo simulation
%K quantum dots superlattice
%K epitaxial growth<br>动力学蒙特卡罗模拟，
%K 量子点超晶格，
%K 外延生长
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=49B0EEB7BDBCFE794097E796CD9567B0&yid=67289AFF6305E306&vid=11B4E5CC8CDD3201&iid=E158A972A605785F&sid=090816B09A011DFC&eid=6D0A7E2533903631&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=24