%0 Journal Article
%T As-soak dependence of interface roughness of AISb/InAs superlattice<br>As保护下的生长中断时间对AlSb/InAs超晶格界面粗糙度的影响
%A Li Zhi-Hua
%A Wang Wen-Xin
%A Liu Lin-Sheng
%A Jiang Zhong-Wei
%A Gao Han-Chao
%A Zhou Jun-Ming
%A <br>李志华
%A 王文新
%A 刘林生
%A 蒋中伟
%A 高汉超
%A 周均铭
%J 物理学报
%D 2007
%I 
%X Different As-soak time is applied during InSb-like interfaces growth of InAs/AlSb superlattices on GaAs(100) substrates. The interface roughness is studied by grazing incidence X-ray reflectivity. The reflectivity curves are simulated by standard software and the rms roughness of the interfaces is obtained. It was hown that the sample with As-soak time of 20 seconds has the most smooth interfaces. By analyzing the microscope images of the samples, we suggest that In-rich interfaces will be formed with too short As-soak time and AlAs-like interfaces are obtained with too long As-soak time, and in hoth cases the interface will be cearsened. Grazing incidence X-ray reflectivity is also recommended as a powerful tool for assessing the structure of superlattices.
%K MBE
%K growth termination
%K superlattice
%K grazing incidence X-ray reflectivity<br>分子束外延
%K 生长中断
%K 超晶格
%K 掠入射X射线反射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=16125355C9ADC67E&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=38B194292C032A66&sid=F654D651B5009E39&eid=2FA47D7E22372F11&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=18