%0 Journal Article
%T Metal nano-hole array copied from AAO template<br>金属铜纳米孔洞阵列膜制备方法研究
%A Zhao Xin-Feng
%A Fang Yan
%A <br>赵信峰
%A 方炎
%J 物理学报
%D 2006
%I 
%X Well-aligned and highly ordered nano-hole array copper membranes were copied from anodic aluminum oxide (AAO) template by vacuum plating. SEM shows that the nanoholes of copper membranes are hexagonally arranged with high regularity consistent with that of AAO template. The mean diameter of the holes was dependent on the corresponding parameter of AAO template. Compared with AAO membranes, the nano-hole array metal ones have many advantages in better chemical and thermal stability and higher mechanical strength, and are likely to play an important role in nano-copy field.
%K AAO template
%K vacuum plating
%K Cu nano-hole array
%K nano-copy<br>AAO模板
%K 真空蒸镀
%K 金属铜纳米孔洞阵列膜
%K 纳米复制
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=D50398F598457BC2&yid=37904DC365DD7266&vid=E514EE58E0E50ECF&iid=DF92D298D3FF1E6E&sid=CA833982CDBEEE4F&eid=0D6238DF4B5A8303&journal_id=1000-3290&journal_name=物理学报&referenced_num=4&reference_num=10