%0 Journal Article
%T Fabrication of photonic crystal on semiconductor materials by using focued ion-beam<br>聚焦离子束研制半导体材料光子晶体
%A Xu Xing-Sheng
%A Xiong Zhi-Gang
%A Jin Ai-Zi
%A Chen Hong-Da
%A Zhang Dao-Zhong
%A <br>许兴胜
%A 熊志刚
%A 金爱子
%A 陈弘达
%A 张道中
%J 物理学报
%D 2007
%I 
%X A method of manufacturing two-dimensional photonic crystals on several kinds of semiconductor materials in near infrared region by a focused ion beam is introduced, and the corresponding fabrication results are presented and show that the obtained parameters of fabricated photonic crystals are identical with the designed ones. Using the tunable laser source, the spectra of the fabricated passive photonic crystal and the active photonic crystal are measured. The experiment demonstrates that the focused ion-beam can be used to fabricate the perfect two-dimensional photonic crystals and their devices.
%K focused ion beam
%K semiconductor material
%K photonic crystal<br>聚焦离子束
%K 半导体材料
%K 光子晶体
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=867DCE1F3BA118F4&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=0B39A22176CE99FB&sid=DE4E739E935BD9A7&eid=9BA5B7BDD4CE0596&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=10