%0 Journal Article
%T Analysis of Cr atom trajectory and focusing deposition in the standing wave field
激光驻波场中Cr原子运动轨迹与汇聚沉积的分析
%A Zheng Chun-Lan
%A Li Tong-Bao
%A Ma Yan
%A Ma Shan-Shan
%A Zhang Bao-Wu
%A
郑春兰
%A 李同保
%A 马艳
%A 马珊珊
%A 张宝武
%J 物理学报
%D 2006
%I
%X The laser-focused atomic deposition is a new way to build the nano transfer standard of high reliability adequate for application. Based on the semi-classical model, this paper starts from the motion equation of chromium atom in the laser standing wave field to get the trajectory of the atoms in the standing wave field by analytical simulation. The effects on focal line features are discussed as a result of the angular collimation, velocity spread in the atomic beam and the spherical aberration. The effects from different deposition positions are also discussed. This paper also gives a sample of the grating structure nanofabricated by laser focusing of Cr atoms.
%K laser standing wave field
%K atomic deposition
%K motion trajectory
%K deposition diffusion
激光驻波场
%K 原子沉积
%K 运动轨迹
%K 沉积分布
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=6E8D4D5D99379A81&yid=37904DC365DD7266&vid=E514EE58E0E50ECF&iid=9CF7A0430CBB2DFD&sid=3FB3EE583948F053&eid=2CE376C676655C19&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=10