%0 Journal Article
%T Optical-readout micro-cantilever array IR imaging system and performance analysis<br>光学读出微梁阵列红外成像及性能分析
%A Xiong Zhi_Ming
%A Zhang Qing_Chuan
%A Chen Da_Peng
%A Wu Xiao_Ping
%A Guo Zhe_Ying
%A Dong Feng_Liang
%A Miao Zheng_Yu
%A Li Chao_Bo
%A <br>熊志铭
%A 张青川
%A 陈大鹏
%A 伍小平
%A 郭哲颖
%A 董凤良
%A 缪正宇
%A 李超波
%J 物理学报
%D 2007
%I 
%X The uncooled IR imaging technology has wide applications. Using the optical readout uncooled IR imaging system built in our laboratory, thermal images of human body are obtained successfully by placing a bi-material micro-cantilever array (FPA) without silicon substrate in air. By comparing the IR imaging results obtained by placing FPA under different vacuum pressures, the pressure dependence of the thermal conductance and system noise is modeled, and the influence to the system performance is analyzed. The model of thermal conductance of gas is analyzed and verified experimentally on condition that the mean-free path of the gas molecules is larger than the gas gap between the bi-material cantilever and the wall of vacuum chamber. Experimental analysis indicates that for FPA working in air, the random vibration noise of the cantilever impacted by the gas molecules' thermal motion is the main source of the system noise. When the pressure decreases to lower than 10-2 Pa, the influence of gas conductance can be neglected, the total thermal conductance decreases to the limit of radiative conductance, and the random vibration noise of the cantilever is reduced to a minimum. The experimental results and theoretical analysis agree well.
%K uncooled infrared imaging
%K optical readout
%K bi-material micro-cantilever array
%K thermal conductance<br>非制冷红外成像
%K 光学读出
%K 双材料微梁阵列
%K 热导
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=D7C6B5790CE30FC9&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=94C357A881DFC066&sid=20481FD9F9546A61&eid=D3BE2D10C95334C0&journal_id=1000-3290&journal_name=物理学报&referenced_num=4&reference_num=12