%0 Journal Article
%T Three-dimensional surface contouring of reflecting micro-object by digital holography with short-coherence light source<br>采用短相干光数字全息术实现反射型微小物体的三维形貌测量
%A Yuan Cao-Jin
%A Zhai Hong-Chen
%A Wang Xiao-Lei
%A Wu Lan
%A <br>袁操今
%A 翟宏琛
%A 王晓雷
%A 吴 兰
%J 物理学报
%D 2007
%I 
%X In this paper, a new lensless digital holography system with short-coherent light source is designed for recording three-dimensional surface contour of reflecting micro-object. In the experiment, the different layers on the inner wall of a conical pore are recorded by changing the path length of object beams to record a series of sub-holograms for three-dimensional reconstruction. This makes the recording system compact and reduces the additional error in the recording. The measured longitudinal error is about 3.5%,with a lateral error of about 2.6%. Besides, the least squares polynomial fit method is used for the first time to carry out three-dimensional reconstruction with a series of two dimensional intensity images of a micro-object, which not only reduces obviously the complication of the three-dimensional reconstruction, but also can be used to carry out three-dimensional reconstruction of a micro-object with strong laser speckle noise, of which the phase images can not be obtained from the phase-unwrapping process.
%K short-coherence light source
%K digital holography
%K three-dimensional surface contouring
%K lensless Fourier holography<br>短相干光源
%K 数字全息术
%K 三维形貌测量
%K 无透镜傅里叶变换全息术
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=E35C0BBCE61F0E98&yid=A732AF04DDA03BB3&vid=014B591DF029732F&iid=CA4FD0336C81A37A&sid=AD16A18DBD734D13&eid=E089FDF3CDAE8561&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=19