%0 Journal Article
%T The model of the magnetic mirror effect in the unbalanced magnetron sputtering ion beams<br>非平衡磁控溅射系统离子束流磁镜效应模型
%A Mu Zong-Xin
%A Li Guo-Qing
%A Qin Fu-Wen
%A Huang Kai-Yu
%A Che De-Liang
%A <br>牟宗信
%A 李国卿
%A 秦福文
%A 黄开玉
%A 车德良
%J 物理学报
%D 2005
%I 
%X A conventional magnetron and a co axial electro solenoid were used to construct an unbalanced magnetron sputtering deposition system for investigating its properties. At 0 2Pa, argon gas discharging, a shielded planar ion collecting electrode was taken to measure the saturation ion beam flux density at the different axial positions. The saturation ion flux reached about 9mA/cm 2. The magneto hydrodynamics was applied to analyse the influences of the magnetic mirror effect on the discharge properties caused by the solenoid. As a result, the comparisons of the theoretical calculations with the experiments indicated that the model described correctly the plasma properties in the unbalanced magnetron sputtering system.
%K plasma
%K metallic thin film/non-magnetism
%K magnetron sputtering
%K magnetic mirror<br>等离子体，
%K 金属薄膜/非磁性，
%K 磁控溅射，
%K 磁镜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=87AB0749236B0E54&yid=2DD7160C83D0ACED&vid=318E4CC20AED4940&iid=38B194292C032A66&sid=9129323FE7AA9847&eid=7A60741D2B519BE0&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=26