%0 Journal Article
%T The measurement of square resistance for microarea by square four-probe techniques and using a modified Rymaszewski''''s formula<br>用改进的Rymaszewski公式及方形四探针法测定微区的方块电阻
%A Liu Xin-Fu
%A Sun Yi-Cai
%A Zhang Yan-Hui
%A Chen Zhi-Yong
%A <br>刘新福
%A 孙以材
%A 张艳辉
%A 陈志永
%J 物理学报
%D 2004
%I 
%X The sheet resistance for a microarea in a large silicon wafers was measured by using a modified Rymaszewski's formulas for a square four_point probe technique. An improved Rymaszewski's formulas was deduced taking into account the shift of probes in square four_point probe measurement. The equation of resistivity for square four_point probe measurement when there were shifts of the probes and there was no shift of the probes was deduced theoretically. A possible error produced by the shift of the probes was analyzed in theory and expressed with graphs. The effect upon measuring results arising from the shift of probes was also discussed. Practical measurement of a specimen has been tested using a self_established equipment of square four_point probes. An equal_value_line graph was plotted for the measurement results.
%K probe techniques
%K square four-point probes
%K sheet
%K resistance for microarea
%K the shift of probes<br>四探针技术
%K 方形四探针
%K 微区电阻
%K 探针游移
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=BE8FFE2DBF22AE8B&yid=D0E58B75BFD8E51C&vid=8E6AB9C3EBAAE921&iid=5D311CA918CA9A03&sid=6F1FAC324A170F6B&eid=9468524DE79F8441&journal_id=1000-3290&journal_name=物理学报&referenced_num=9&reference_num=10