%0 Journal Article
%T Phase-shift algorithm research based on multiple-beam interference principle<br>基于多光束干涉原理的相移算法研究
%A Luo Zhi-Yong
%A Yang Li-Feng
%A Chen Yun-Chang
%A <br>罗志勇
%A 杨丽峰
%A 陈允昌
%J 物理学报
%D 2005
%I 
%X Aiming at the application of precision measurement of length, the phase shift algorithm including algorithm error and optimum range of the phase shift step was studied by using the multiple beam interference principle in this paper. We have derived an accurate formula for the intensity distribution of multiple beam interference (multiple reflection by and transmission through the optical surface) in the basic principle of interference optics. Based on this formula and the numerical analysis technique, we have found the optimum value of the phase shift step and the applicable range of the initial phase difference between interference beams by using the precision measurement of length with Fizeau interferometer.We also found the respective relationships between the original phase error and the phase of four step algorithm (and of the five step algorithm) due to the intensity error from cosine dependence. We have assessed the uncertainty from several main error sources of the multiple beam interference.
%K phase
%K shifting algorithm
%K multiple
%K beam interference
%K precision length measurement
%K uncertainty<br>干涉原理
%K 算法研究
%K 不确定度评估
%K 多光束干涉
%K 步长优化
%K 算法误差
%K 相移算法
%K 多次反射
%K 基本原理
%K 精确公式
%K 相位分布
%K 干涉光束
%K 取值范围
%K 数值分析
%K 依赖关系
%K 误差来源
%K 干涉仪
%K 光干涉
%K 相位差
%K 四步法
%K 五步法
%K 光学
%K 测长
%K 精密
%K 光强
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=14FEDC67575C433D&yid=2DD7160C83D0ACED&vid=318E4CC20AED4940&iid=DF92D298D3FF1E6E&sid=E284E18FD9B34CE1&eid=C521E961976FC4C3&journal_id=1000-3290&journal_name=物理学报&referenced_num=9&reference_num=8