%0 Journal Article
%T Improved dielectric and ferroelectric characteristics of highly (111)-oriented Pb(Zr0.52Ti0.48)O3 films produced by sol-gel method<br>(111)择优取向的Pb(Zr0.52Ti0.48)O3铁电薄膜的制备及研究
%A Zheng Fen-Gang
%A Chen Jian-Ping
%A Li Xin-Wan
%A <br>郑分刚
%A 陈建平
%A 李新碗
%J 物理学报
%D 2006
%I 
%X 选用不同浓度的Pb(Zr0.52Ti0.48)O3溶胶，用Sol-gel法在Pt/Ti/SiO2/Si基片上沉积一层厚度不同的Pb(Zr0.52Ti0.48)O3 (PZT52)过渡层，经400℃烘烤、550℃退火等程序后，再用Sol-gel法在PZT52过渡层上沉积Pb(Zr0.52Ti0.48)O
%K PZT thin film
%K preferred orientation
%K buffer layer
%K remnant polarization<br>PZT铁电薄膜，
%K 择优取向，
%K 过渡层，
%K 剩余极化强度
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=BDE89A66E7FA3A7E&yid=37904DC365DD7266&vid=E514EE58E0E50ECF&iid=B31275AF3241DB2D&sid=653CB0F41D48E7F1&eid=6A0BED7D52DFBDC1&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=17