%0 Journal Article
%T Study on the preparation of high barrier hydrogenated carbon film and its properties<br>高阻隔碳氢膜的制备及性能研究
%A Chen Guang-Liang
%A Ge Yuan-Jing
%A Zhang Yue-Fei
%A Zhang Guang-Qiu
%A Zhang Gu-Ling
%A Wang Jiu-Li
%A Liu Yuan-Fu
%A Gu Wei-Chao
%A Feng Wen-Ran
%A Liu Chi-Zi
%A Yang Si-Ze
%A <br>陈光良
%A 葛袁静
%A 张越飞
%A 张广秋
%A 张谷令
%A 王久丽
%A 刘元福
%A 顾伟超
%A 冯文然
%A 刘赤子
%A 杨思泽
%J 物理学报
%D 2005
%I 
%X Hydrogenated carbon thin films were fabricated on the surface of polyethylene terepthalate(PET) by radio frequency plasma enhanced chemical vapor deposition (r. f.PECVD).The film structure properties were studied by means of atomic force mic roscope(AFM), x_ray photo_electron (XPS), laser Raman spectroscopy, Fourier_tra nsform infrared spectra(FTIR),etc. The barrier property of the film was conducte d on the water vapor permeation instrument. The results show that nano_hydrogen ated carbon films have been deposited on PET surface and they are mainly compose d of sp2 and sp3 hybridized hydrogenated carbon compounds. Plasma pa rameters influence the films' growth rate and structure characteristics. The fil m reduces the water vapor permeation ratio of the PET by 7 times at a film thick ness of only 900nm.
%K hydrogenated carbon film
%K r
%K f
%K PECVD
%K PET
%K barrier property<br>碳氢膜，
%K 射频等离子体化学气象沉积法，
%K 聚对苯二甲酸乙二醇酯，
%K 阻隔性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=8D40D83EB2C578E7&yid=2DD7160C83D0ACED&vid=318E4CC20AED4940&iid=0B39A22176CE99FB&sid=F2947E14627CD734&eid=CE504F5B1E192581&journal_id=1000-3290&journal_name=物理学报&referenced_num=2&reference_num=21