%0 Journal Article
%T Study on the evolvement of plasma generated by pulsed laser deposition of thin film<br>脉冲激光制膜过程中等离子体演化规律的研究
%A Zhang Duan-Ming
%A Guan Li
%A Li Zhi-Hu
%A Zhong Zhi-Cheng
%A Hou Si-Pu
%A Yang Feng-Xia
%A Zheng Ke-Yu
%A <br>张端明
%A 关丽
%A 李智华
%A 钟志成
%A 侯思普
%A 杨凤霞
%A 郑克玉
%J 物理学报
%D 2003
%I 
%X By finite difference method, the evolvement of plasma generated by a pulsed laser is studied for pulsed laser deposition of KTa 0 65 Nb 0 35 O 3(KTN) thin film. We have discussed the movement of particles in plasma in isothermal and adiabatic expansion stages in more detail. At the same time, we have simulated the change of figure of plasma at different time. Moreover, the physics mechanism in expansion of the plasma have been explained. The theoretical results are compared with our experiments and other author's conclusions.
%K pulsed laser deposition
%K plasma
%K finite difference
%K evolvement of velocity
%K KTN thin film<br>脉冲激光沉积，
%K 等离子体，
%K 有限差分，
%K 速度演化，
%K KTN薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=E8C59A4521908D2E&yid=D43C4A19B2EE3C0A&vid=286FB2D22CF8D013&iid=CA4FD0336C81A37A&sid=0C191C6ECF79047F&eid=28F9D9CF04F424FF&journal_id=1000-3290&journal_name=物理学报&referenced_num=5&reference_num=7