%0 Journal Article
%T Analysis of the reflective performance of EUV multilayer under the influence of capping layer<br>帽层对极紫外多层膜反射特性影响分析
%A Wang Hong-Chang
%A Wang Zhan-Shan
%A Li Fo-Sheng
%A Qin Shu-Ji
%A Du Yun
%A Wang Li
%A Zhang Zhong
%A Chen Ling-Yan
%A <br>王洪昌
%A 王占山
%A 李佛生
%A 秦树基
%A 杜芸
%A 王利
%A 张众
%A 陈玲燕
%J 物理学报
%D 2004
%I 
%X In this paper we present a solution that addresses the reflectance loss due to oxidation. The solution is a capping layer (CL) that acts as an effective oxidation barrier when the multilayer (ML) is exposed to the extreme ultraviolet (EUV) light in the presence of water vapor, so that the optical element of multilayer can be used as long as possible. The theoretical reflectivity of ML Mo/Si EUV mirrors is calculated at 13.9nm under the different CL materials. The thicknesses of the CL and standard ML are optimized by the simplex method, meanwhile the reflectivity of ML can be further enhanced when the layer-by-layer theory is used. Finally the electric-field intensity distribution in the top layers of the ML is analyzed when the CL is added.
%K multilayer
%K reflectivity
%K capping layer
%K extreme ultraviolet<br>多层膜
%K 反射率
%K 帽层
%K 极紫外
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=7751BB24EFEB9579&yid=D0E58B75BFD8E51C&vid=8E6AB9C3EBAAE921&iid=DF92D298D3FF1E6E&sid=054C27D6C3EE1321&eid=594861585BE7463E&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=19