%0 Journal Article
%T SYNTHESIS AND MECHANISM OF BC2N THIN FILMS IN STALK-LIKE GROWTH<br>BC2N薄膜的柱状生长及生长机理
%A MA XI-YING
%A HE DE-YAN
%A CHEN GUANG-HUA
%A <br>马锡英
%A 贺德衍
%A 陈光华
%J 物理学报
%D 2001
%I 
%X The BC2N thin films in stalklike growth have been deposited by hot filament assisted and rf plasma chemical vapor deposition (CVD). It was shown that the composition of the thin films mainly consists of BC2N, in which B, C and N were combined in atomic bonds. And the surface of the film took the shape of stalks, they were in regular arrangemeut with a uniform orientation observed with scanning electron microscopy.-In addition, we found this kind of growth had intimate relation with the deposition parameters. Finally, we analyzed the growth machanism of the stalklike BC2N.
%K BC2N
%K CVD<br>BC2N
%K 柱状生长
%K CVD法
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=5D65080E0C72BEE0&yid=14E7EF987E4155E6&vid=771152D1ADC1C0EB&iid=F3090AE9B60B7ED1&sid=BA1E75DF0B7E0EB2&eid=8E60891DE9EC9643&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=25