%0 Journal Article
%T EFFECT OF NITROGEN ON THE RESIDUAL STRESS AND ADHESION OF DIAMOND-LIKE AMORPHOUS CARBON NITRIDE FILMS<br>氮对类金刚石薄膜的微观结构内应力与附着力的影响
%A JU JIAN-HUA
%A XIA YI-BEN
%A ZHANG WEI-LI
%A WANG LIN-JUN
%A SHI WEI-MIN
%A HUANG ZHI-MING
%A LI ZHI-FENG
%A ZHENG GUO-ZHEN
%A TANG DING-YUAN
%A <br>居建华
%A 夏义本
%A 张伟丽
%A 王林军
%A 史为民
%A 黄志明
%A 李志锋
%A 郑国珍
%A 汤定元
%J 物理学报
%D 2000
%I 
%X Microstructure and adhesion properties of nitrogen-doped diamond-like amorphous carbon (DLC) film deposited by r f plasma-enhanced chemical vapor deposition method is studied by atomic force microscope, Auger electron spectroscopy (AES) and micro-indentation analysis. Results show that, with the increase of nitrogen content, particles of tens of nanometer in size appear in the film. The atomic lateral force microscope and AES analyses show that these nano particles are nitrogen-rich amorphous carbon nitride CNx, where x is larger than 0.126. Micro-indentation measurement shows that this DLC/CNx nano-composite structure reduces the residual stress of the film and improves the adhesion between DLC film and Si substrate.
%K diamond-like carbon film
%K microstructure
%K adhesion properties<br>类金刚石碳膜，
%K 微观结构，
%K 附着特性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=58BB6CE6708FB787&yid=9806D0D4EAA9BED3&vid=2A3781E88AB1776F&iid=708DD6B15D2464E8&sid=0F47065E4B85EC48&eid=803216C5F01D2528&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=4