%0 Journal Article %T EFFECT OF BF+2 IMPLANTED IN HARDENED Si-GATE PMOSFET
BF+2注入加固硅栅PMOSFET的研究 %A ZHANG TING-QING %A LIU JIA-LU %A LI JIAN-JUN %A WANG JIAN-PING %A ZHANG ZHENG-XUAN %A XU NA-JUN %A ZHAO YUAN-FU %A HU YU-HONG %A
张廷庆 %A 刘家璐 %A 李建军 %A 王剑屏 %A 张正选 %A 徐娜军 %A 赵元富 %A 胡浴红 %J 物理学报 %D 1999 %I %X 系统地研究了BF+2注入硅栅P-channel metal-oxide-semiconductor field-effect transistor(PMOSFET)阈值电压漂移与γ辐照总剂量之间的关系,深入地探讨了BF+2注入抗γ辐射加固的机理.结果表明,BF+2注入对硅栅P-channel metal-oxide-semiconductor(PMOS)在γ辐照下引起的阈值电 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=3C865D782028E2EB&yid=B914830F5B1D1078&vid=B6DA1AC076E37400&iid=59906B3B2830C2C5&sid=A05AF66BE0C3DF48&eid=05E18E8B63815C20&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0