%0 Journal Article
%T THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS<br>射频辉光放电等离子体的电探针诊断及数据处理
%A YAO RUO-HE
%A CHI LING-FEI
%A LIN XUAN-YING
%A SHI WANG-ZHOU
%A LIN KUI-XUN
%A <br>姚若河
%A 池凌飞
%A 林璇英
%A 石旺舟
%A 林揆训
%J 物理学报
%D 2000
%I 
%X Langmuir probe is an important tool to diagnose the plasma in radio frequency (rf) glow discharge. A new method has been used to obtain the electron energy distribution function in plasma by the numerical differentiation of the I-V probe characteristic.This method is based on Fourier transform and could overcome the defects of other methods. In this way, the second derivative signal of Langmuir probe I-V characteristic is obtained automatically and accurately. The mean electron energy and electron concentrations in rf glow discharge plasma in silane were obtained by Langmuir probe.
%K 射频辉光放电等离子体
%K 电子探针诊断
%K 数据处理
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=74C9781B29F7986AC80B69501BB86C09&yid=9806D0D4EAA9BED3&vid=2A3781E88AB1776F&iid=94C357A881DFC066&sid=55434AEC30CBAE6B&eid=F08C87DC7855E316&journal_id=1000-3290&journal_name=物理学报&referenced_num=5&reference_num=1