%0 Journal Article
%T CARBON FILM DEPOSITED BY MASS-SELECTED LOW ENERGY ION BEAM TECHNIQUE AND ION BOMBARDMENT EFFECT<br>质量分离低能离子束沉积碳膜及离子轰击效应
%A LIAO MEI-YONG
%A ZHANG JIAN-HUI
%A QIN FU-GUANG
%A LIU ZHI-KAI
%A YANG SHAO-YAN
%A WANG ZHAN-GUO
%A LIEE SHUIT-TANG
%A <br>廖梅勇
%A 张键辉
%A 秦复光
%A 刘志凯
%A 杨少延
%A 王占国
%A 李述汤
%J 物理学报
%D 2000
%I 
%X By mass-selected low energy ion beam deposition, amorphous carbon film was obtained. X-ray diffraction, Raman and Auger electron spectroscopy depth line shape measurements showed that such carbon films contained diamond particles. The main growth mechanism is subsurface implantation. Furthermore, it was indicated in a different way that ion bombardment played a decisive role in bias enhanced nucleation of chemical vapor deposition diamond.
%K amorphous carbon
%K ion bombardment
%K mass-selected low energy ion beam<br>非晶碳，
%K 离子轰击，
%K 质量分离低能离子束
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=FC9F0C7D79FFB488&yid=9806D0D4EAA9BED3&vid=2A3781E88AB1776F&iid=708DD6B15D2464E8&sid=5D16F3E1BCE7CF8E&eid=FFE181911AE93FD6&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=6