%0 Journal Article
%T Thickness measurement of GaN film based on transmission spectra<br>基于透射谱的GaN薄膜厚度测量
%A Zhang Jin-Cheng
%A Hao Yue
%A Li Pei-Xian
%A Fan Long
%A Feng Qian
%A <br>张进城
%A 郝跃
%A 李培咸
%A 范隆
%A 冯倩
%J 物理学报
%D 2004
%I 
%X By analyzing the transmission spectra of hetero-epitaxial GaN films on sapphires, a film thickness measurement method is presented. The method uses the interference effect of the crystal film and considers the effect of the refractive index n on the photon wavelength. Applications of it show that the method is a rapid and precise one for measuring the film thickness of GaN crystals.
%K GaN
%K transmission spectra
%K thickness measurement<br>GaN，
%K 透射谱，
%K 厚度测量
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=7CE0C3124BBCE9EF&yid=D0E58B75BFD8E51C&vid=8E6AB9C3EBAAE921&iid=E158A972A605785F&sid=F5C4DB540B02644F&eid=9D6E80F951A5107A&journal_id=1000-3290&journal_name=物理学报&referenced_num=10&reference_num=4