%0 Journal Article
%T Influence of hydrogen-enhanced etching on the quality of diamond films and the existing form of sp2 bonding carbon atoms<br>氢的强化刻蚀对金刚石薄膜品质的影响与sp2杂化碳原子的存在形态
%A Ma Bing-Xian
%A Yao Ning
%A Yang Shi-E
%A Lu Zhan-Ling
%A Fan Zhi-Qin
%A Zhang Bing-Lin
%A <br>马丙现
%A 姚 宁
%A 杨仕娥
%A 鲁占灵
%A 樊志勤
%A 张兵临
%J 物理学报
%D 2004
%I 
%X Diamond thin films were prepared by using chemical vapor deposition. It is enhanced to etch the sp2 bonding carbon atoms of the film by intermittently closing the methane gas during the deposition. These films were characterized by Raman spectroscopy and microscopy. The results show that the enhanced etching of sp2 bonding carbon atoms has no obvious effect on quality and microstructure of the diamond films. It reveals that the sp2 bonding carbon atoms do not mainly exist in graphitic or amorphous carbon grain form in the films but mainly among the carbon atoms of diamond grain surface or grain boundary.
%K chemical vapor deposition
%K diamond film
%K Raman spectrum
%K enhanced etching<br>化学气相沉积
%K 金刚石薄膜
%K 拉曼光谱
%K 强化刻蚀
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=83C89AF521783FE8&yid=D0E58B75BFD8E51C&vid=8E6AB9C3EBAAE921&iid=DF92D298D3FF1E6E&sid=CE509777249FF025&eid=8B30EADB51481F94&journal_id=1000-3290&journal_name=物理学报&referenced_num=2&reference_num=20