%0 Journal Article
%T THE STUDY OF EPITAXIAL GROWTH ZnO THIN FILM ON A (0112) SAPPHIRE SUBSTRATE USING ECR PLASMA SPUTTERING METHOD
用微波ECR等离子体溅射法在蓝宝石(0112)晶面上生长ZnO薄膜的研究
%A WANG JIAN-HUZ
%A YUAN RUN-ZHANG
%A WU QIN-CHONG
%A REN ZHAO-XING
%A
汪建华
%A 袁润章
%A 邬钦崇
%A 任兆杏
%J 物理学报
%D 1999
%I
%X 蓝宝石上外延生长ZnO薄膜在表面波和声光器件中有重要的应用.用微波电子回旋共振(ECR)等离子体溅射法在蓝宝石(0112)晶面上外延生长了ZnO薄膜,膜无色透明,并且表面光滑,基片温度为380℃,为探索沉积工艺参数对薄膜结构的影响,用XRD对不同基片温度和沉积速率生长的ZnO薄膜进行了研究.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=DCA710224BBFF0AEA7B4AE6A4EA76B71&yid=B914830F5B1D1078&vid=B6DA1AC076E37400&iid=94C357A881DFC066&sid=2F26E27A20AEB31F&eid=40700C9CB4E84E3B&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0