%0 Journal Article
%T PRIMARY STUDY ON THE IRRADIATION EFFECT OF HYDROGEN IONS ON DIAMOND-LIKE CARBON FILMS<br>用高能H+束辐照类金刚石碳膜的研究
%A WANG TIAN-MIN
%A WANG WEI-JIE
%A HAN PEI-GANG
%A HUANG LIANG-FU
%A LUO CHONG-TAI
%A <br>王天民
%A 王维洁
%A 韩培刚
%A 黄良甫
%A 罗崇泰
%J 物理学报
%D 1992
%I 
%X Diamond-like carbon (DLC) films, prepared by dual-ion beam sputtering method on glass substrate, were irradiated by high energy hydrogen ions(H+) under different combinations of ion energy and irradiation dose. Raman spectroscopy, infra-red transmittance spectroscopy, electrical resistivity measurement and adhesive force determination were used to characterize the as-deposited and the irradiated films. The results showed that, comparing with that of as-deposited ones, the properties and structures of irradiated films were changed obviously: the infra-red transmittance in the range of 1450 to 6000 cm-1 was increased; the electrical resistivity had nearly no large change. The relative ratios of sp2 C-H bond to sp3 C-H bond and sp3 C-C bond to sp2 C-C bond were also increased, while the component of sp3 C-C bond and sp2 C-C bond was decreased because of H+ irradiation. On the basis of the above results., the relations between properties and structures for irradiation On the basis of the above results, the relations between properties and structures for irradiated films were discussed in detail between properties and structures for irradiated films were discussed in detail. It is concluded It is concluded that the H+ irradiation effect on DLC films is different from that of Cc or other heavier ions. The main role of H+ on the films is the teching effect on weaker bonds. We believe that it is possible to improve the properties of DLC films by means of high energy H+ irradiation.
%K DLC
%K 膜层
%K 离子束
%K 辐射
%K 氢离子
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6e709dc38fa1d09a4b578dd0906875b5b44d4d294832bb8e&cid=47ea7cfddebb28e0&jid=29df2cb55ef687e7efa80dfd4b978260&aid=1150a4eb01a57b37dfb8b56b61dca3e1&yid=f53a2717bdb04d52&vid=2001e0d53b7b80ec&iid=0b39a22176ce99fb&sid=44a4891e33bff455&eid=c1b34927d429e92f&journal_id=1000-3290&journal_name=物理学报&referenced_num=2&reference_num=3