%0 Journal Article
%T INFLUENCE OF THE INCIDENCE ANGLE OF THE ION-BOMBARDMENT ON THE SPUTTERING PARAMETERS<br>离子轰击入射角对溅射参数的影响
%A SHAO QI-YUN
%A HUO YU-KUN
%A CHEN JIAN-XIN
%A WU SHI-MING
%A PAN ZHENG-YING
%A <br>邵其鋆
%A 霍裕昆
%A 陈建新
%A 吴士明
%A 潘正瑛
%J 物理学报
%D 1991
%I 
%X In this paper, the effects of the incidence angle of the ion-bombardment on the puttering parameters ire investigated by using Monte Carlo simulation based on the binary collision approximation. The dependence of sputtering yields, energy and angular distribution as well as threshold energy of sputtered particles on incidence angle are discussed. The results of calculation are compared with data given by semi-empirical formula and measurments.
%K 离子轰击
%K 入射角
%K 溅射参数
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=F2FE3C9F226721B6A7E0A9E0081ACE00&yid=116CB34717B0B183&vid=1371F55DA51B6E64&iid=E158A972A605785F&sid=00520952CD4BF212&eid=1C3BB0F444F5E427&journal_id=1000-3290&journal_name=物理学报&referenced_num=1&reference_num=1