%0 Journal Article
%T INVESTIGATION ON THERMAL STABILITY OF REACTIVE- SPUTTERING a-Si:H/a-Ge:H SUPERLATTICES<br>反应溅射a-Si:H/a-Ge:H超晶格的热稳定性
%A WANG YIN-YUE
%A XU HUAI-ZHE
%A CHEN GUANG-HUA
%A <br>王印月
%A 许怀哲
%A 陈光华
%J 物理学报
%D 1992
%I 
%X The thermal stability of a-Si:H/a-Ge:H superlattices was studied using LR and XRD spec tra. It was found that the crystallization temperature of superlattices with small layer thickness is higher than that of bulk a-Ge:H. Results are discussed preliminarily.
%K 硅
%K 非晶体
%K 超晶格
%K 热稳定性
%K 晶化
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=1150A4EB01A57B3757C7A2AD69341D04&yid=F53A2717BDB04D52&vid=2001E0D53B7B80EC&iid=0B39A22176CE99FB&sid=119B6C0AA09DE6B9&eid=407C905D8F0449C4&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0