%0 Journal Article
%T DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSING<br>Langmuir单探针诊断射频辉光放电等离子体及其数据处理
%A CHI LING-FEI
%A LIN KUI-XUN
%A YAO RUO-HE
%A LIN XUAN-YING
%A YU CHU-YING
%A YU YUN-PENG
%A <br>池凌飞
%A 林揆训
%A 姚若河
%A 林璇英
%A 余楚迎
%A 余云鹏
%J 物理学报
%D 2001
%I 
%X Langmuir probe is an important diagnostic tool for measuring plasma parameters. A tuned single probe has been used to diagnostic the electron energy distribution function in Ar radio frequency (13.56MHz) glow plasma. The second derivative of probe I-V characteristic was obtained after using numerical filter procedure to eliminate the statistical noise in measured I-V characteristic. A differential circuit has been designed and applied to measure the second derivative of I-V characteristic on line under the same discharge conditions. The results of the two methods are in agreement with each other.
%K Langmuir probe
%K electron energy distribution function
%K numerical filter
%K differential circuit<br>Langmuir探针
%K 二次微商
%K 数值滤波
%K 微分电路
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=002F26A75E6A2583926AA2ACB0DB743A&yid=14E7EF987E4155E6&vid=771152D1ADC1C0EB&iid=DF92D298D3FF1E6E&sid=AF8A4A632EC02431&eid=E62D9AFED5C50734&journal_id=1000-3290&journal_name=物理学报&referenced_num=11&reference_num=5