%0 Journal Article
%T INFLUENCE OF SURFACE TOPOGRAPHY ON THE SPUTTE RING YIELDS OF SILVER<br>离子轰击引起的表面形貌对Ag的溅射产额的影响
%A PAN JI-SHENG
%A WANG ZHEN-XIA
%A TAO ZHEN-LAN
%A ZHANG JI-PING
%A ZHANG HUI-MING
%A ZHAO LIE
%A <br>潘冀生
%A 王震遐
%A 陶振兰
%A 章骥平
%A 张慧明
%A 赵烈
%J 物理学报
%D 1991
%I 
%X The angular distributions and yields of silver atoms sputtered from a Ag sample have been measured using collector technique and RBS analysis. The Ag target was sputtered at normal incidence with 27keV Ar+ ions. The irradiated surface was examined by scanning electron microscopy. It was found that all the angular distributions were over-cosine with different irradiation dose, but the sputtering yields were dose-dependent. The experimental result can be explained with surface topography and sputtering yield as a fuction of the angle of incidence. It is found that surface topography seems to be an important factor to influence sputtering yield. a new concept, namely "apparent yield", is presented.
%K 离子轰击
%K 表面形貌
%K Ag
%K 溅射产额
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=8E3264D0D4AFC6E31DE4CAE96D5C639C&yid=116CB34717B0B183&vid=1371F55DA51B6E64&iid=59906B3B2830C2C5&sid=EA357AD73C8E13BC&eid=BA1E75DF0B7E0EB2&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=3