%0 Journal Article
%T DIAMOND FILMS GROWTH ON POLYCRYSTALLINE Cu AND PHOSPHORUS DEOXIDIZED Cu<br>金刚石薄膜在多晶铜和磷脱氧铜基片上的生长
%A HAN SI-JIN
%A CHEN JIN-SONG
%A FANG RONG-CHUAN
%A SHANG NAI-GUI
%A SHAO QIN-YI
%A LE DE-FEN
%A LIAO YUAN
%A YE ZHI-YUAN
%A YI BO
%A CUI JING-BIAO
%A <br>韩祀瑾
%A 陈金松
%A 方容川
%A 尚乃贵
%A 邵庆益
%A 乐德芬
%A 廖 源
%A 叶祉渊
%A 易 波
%A 崔景彪
%J 物理学报
%D 1998
%I 
%X Two kinds of Cu substrates were used to grow diamond films,one of them being 99.99% polycrystalline Cu foil and the other 99.95% phosphorus deoxidized Cu foil.Large-area,free-standing polycrystalline diamond films were obtained by hot filament CVD on both substrates.The diamond films on the two kinds of Cu substrates were comparatively investigated by high resolution optical microscopy,scanning electron microscopy,Raman spectroscopy,and X-ray diffraction.The quality of films on deoxidized Cu are not worse than that on polycrystalline Cu,while the nucleation densities ,growth rate and stress in film on deoxidized Cu is higher than those on polycrystalline Cu.It is indicated that the annealing process and optimized growth conditions must be used to obtain large-area continuous diamond films.
%K 多晶铜
%K 磷脱氧铜
%K 金刚石
%K 薄膜生长
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=478BD5F0F36565A6303C5D5A1842C72E&yid=8CAA3A429E3EA654&vid=F4B561950EE1D31A&iid=E158A972A605785F&sid=710C005323C0774A&eid=09F7C8D609E885AE&journal_id=1000-3290&journal_name=物理学报&referenced_num=5&reference_num=4