%0 Journal Article
%T STRUCTURE AND SURFACE ELECTRICAL PROPERTIES OF POLYCRYSTALLINE ZrO2 IMPLANTED BY Ni ION<br>Ni离子注入多晶ZrO2的表面电性能和结构
%A WANG GUO-MEI
%A YUN HUAI-SHUN
%A JIANG BING
%A LI XING-DAN
%A WU DAI-HUA
%A YANG SHENG-RONG
%A <br>王国梅
%A 恽怀顺
%A 江冰
%A 李兴丹
%A 吴代华
%A 杨生荣
%J 物理学报
%D 1996
%I 
%X In this paper, it is reported that the nickel ions (140 keV, 5×1015-2×1017ions/cm2) were implanted at room temperature into the specimens of yttria which were partially stabilized by zirconi-a. The annealing processes were decided . By making use of electric measurement, Rutherford back scattering spectroscopy (RBS), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy, we have studied the effects of implantation and annealing on the electrical properties of the surface and the structure of implanted layer of polycrystalline ZrO2.
%K 氧化锆
%K 多晶
%K 镍离子
%K 陶瓷
%K 离子注入
%K 表面电性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=7411BF4698E83734D4F9B3BD146AE6A8&yid=8A15F8B0AA0E5323&vid=94E7F66E6C42FA23&iid=DF92D298D3FF1E6E&sid=7C112B12217D9FAF&eid=9905045FEE51B18F&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=2