%0 Journal Article
%T DESIGN OF SOFT X-RAY MULTILAYERS FOR SHORTER WAVELENGTHS<br>短波长软X射线多层膜高级次峰设计与制备
%A SHAO JIAN-DA
%A YI KUI
%A FAN ZHENG-XIU
%A WANG RUN-WEN
%A CUI MING-QI
%A <br>邵建达
%A 易葵
%A 范正修
%A 王润文
%A 崔明启
%J 物理学报
%D 1997
%I 
%X This paper discussed a method of designing soft X-ray multilayers for shorter wavelengths and showed that a difference between the designing of longer wavelength soft X-ray multilayers and that of the shorter one.For the latter,the minimum continuous thickness of the metal layer have to be considered.The method of second order designing could be a way to deposit high-quality multilayer mirrors for shorter wavelengths.The measured reflectivity of a Mo/Si multilayer for 4.47nm is also reported.
%K 软X射线
%K 多层膜
%K 布喇格衍射峰
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=59DCF672634DFB419E22A470C012A2AE&yid=5370399DC954B911&vid=D997634CFE9B6321&iid=708DD6B15D2464E8&sid=04EC63ECE4524BC7&eid=2FF6669B7D9FF210&journal_id=1000-3290&journal_name=物理学报&referenced_num=4&reference_num=7