%0 Journal Article
%T AN IN-LINE ANALYSIS SYSTEM OF SLOW POSITRON BEAM FOR MOLECULAR BEAM EPITAXY<br>用于分子束外延的慢正电子束在线分析系统
%A HE YUAN-JIN
%A HU YONG
%A DAI LUN
%A <br>何元金
%A 胡勇
%A 戴伦
%J 物理学报
%D 1992
%I 
%X The design and arrangement of an in-line analysis system of slow positron beam for molecular beam epitaxy is described and the analysis method using positron beam technique to study semiconductor films is introduced. In the slow positron moderator, a combination of tungsten-rings and "Venetian blind" structure are used to obtain a higher efficiency of conversion from fast to slow positrons.
%K 半导体
%K 薄膜
%K 外延生长
%K 分析方法
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=828FD0BCF16FC151AF7C11E8C4A45C28&yid=F53A2717BDB04D52&vid=2001E0D53B7B80EC&iid=38B194292C032A66&sid=5A751AE9FA58A3FB&eid=91BAD12CFABB3251&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=3