%0 Journal Article
%T STUDY OF AlGaAs/GaAs WAVEGUIDE STRUCTURE BY X-RAY DOUBLE CRYSTAL DIFFRACTION<br>AlGaAs/GaAs波导薄膜X射线双晶衍射研究
%A MAI ZHEN-HONG
%A GUI SHU-FAN
%A WANG CHAO-YING
%A WU LAN-SHENG
%A <br>麦振洪
%A 崔树范
%A 王超英
%A 吴兰生
%J 物理学报
%D 1991
%I 
%X An AlGaAs/GaAs waveguide structure sample was investigated by X-ray double crystal diffraction technique. Based on the X-ray dynamical diffraction theory the reflection intensities of the substrate and the films were calculated. Comparing the calculated results with the experimental ones, the real structure of the sample was obtained. The factors affecting the double crystal diffraction recking curves are discussed.
%K AlGaAs
%K GaAs
%K 薄膜
%K X射线
%K 双晶衍射
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=E0F4F8E551E90F9613AE91FD456F628E&yid=116CB34717B0B183&vid=1371F55DA51B6E64&iid=B31275AF3241DB2D&sid=CF2C3194F1B66D28&eid=1BE4748776BF02C4&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=1