%0 Journal Article
%T STUDIES AND ANALYSIS FOR MICROSTRUCTURES OF MICRO-CRYSTALLIZATION PROCESS OF AMORPHOUS SILICON FILMS<br>非晶硅薄膜晶化过程中微结构的分析
%A HE YU-LIANG
%A ZHOU HENG-NAN
%A LIU XIANG-NA
%A CHENG GUANG-XU
%A YU SHI-DONG
%A <br>何宇亮
%A 周衡南
%A 刘湘娜
%A 程光煦
%A 余是东
%J 物理学报
%D 1990
%I 
%X We have studied the fine procedure and characters of the microstructures for the a-Si:H and a-Si films, which have been changed from amorphous phase to microcrystalline phase, by means of Rigaku 3015 type X-ray diffraction spectroscope and high resolution electronic microscopy (HREM). This research provides some intuitive information for the transformation process, in which amorphous silicon filims change over from amorphous phase to micro-crystalline phase, and further deepens the understanding for the microstructures of amorphous silicon films.
%K 非晶
%K 硅
%K 薄膜
%K 晶化
%K 微结构
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=3300A3EB3DC24044ED7E3A8FF42E7DD2&yid=8D39DA2CB9F38FD0&vid=7C3A4C1EE6A45749&iid=708DD6B15D2464E8&sid=7E823D8841E016EC&eid=0344F3FCD862F7B0&journal_id=1000-3290&journal_name=物理学报&referenced_num=5&reference_num=8