%0 Journal Article
%T PREFERENTIAL SPUTTERING OF THE TERNARY ALLOY SYSTEM Cu76Ni15Sn9<br>三元合金Cu76Ni15Sn9的离子溅射研究
%A WANG ZHEN-XIA
%A PAN JI-SHENG
%A ZHANG JI-PING
%A WANG CHUAN-SHAN
%A LI XIN-NIAN
%A ZHOU SHU-XIN
%A LUO WEN-YUN
%A ZHANG HUI-MING
%A ZENG YUE-WU
%A ZHAO LIE
%A <br>王震遐
%A 潘冀生
%A 章骥平
%A 王传珊
%A 李欣年
%A 周树鑫
%A 罗文芸
%A 张慧明
%A 曾跃武
%A 赵烈
%J 物理学报
%D 1994
%I 
%X The preferential sputtering of the ternary alloy system Cu76Ni15Sn9 has been studied under 27keV argon ion bombardment at normal incidence using collection film technique combined with Auger electron spectroscopy analysis. After sputtering target surface was examined in a scanning electron microscope, and the surface composition was measured with electron probe microanalyser for topographical features of different micro-region surface. The experimental results showed that the preferred ejection of Cu atoms compared with Ni atoms and of Ni atoms compared with Sri atoms take place over the whole range of the measured ejection angle (0-600). The influence of the topographical features and "locally rich element" phenomenon on the ejection atoms are discussed.
%K 离子溅射
%K 铜镍锡
%K AES
%K SEM
%K EPMA
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=2BC04F7FEA408E803CCDA3163A09F53F&yid=3EBE383EEA0A6494&vid=BE33CC7147FEFCA4&iid=59906B3B2830C2C5&sid=DE12191FBD62783C&eid=FFD10F7019FAA9EC&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=2