%0 Journal Article
%T THE EFFECT OF ANNEALING ON THE PROPERTIES OF AMORPHOUS GERMANIUM/CRYSTALLINE SILVER BILAYER
退火对非晶Ge/晶态Ag迭层膜性质的影响
%A LIU HONG-BAO
%A WANG JI-HONG
%A WANG CHANG-SUI
%A XUE BAI
%A ZHANG YU-HENG
%A
刘宏宝
%A 王冀洪
%A 王昌燧
%A 薛白
%A 张裕恒
%J 物理学报
%D 1987
%I
%X By using X-ray differaction, SEM and the measurement of sheet resistance, the effect of annealing of a-Ge/c-Ag bilayer were studied. Sheet resistance of the bilayers were measured in the range 80-300 K. The relation between sheet resistance at room temperature and annealing temperature was presented. A new diffusion mechanism was found. As the temperature increased, amorphous germanium crystallize. In the meantime, a part of Ge diffuse into Ag. When the temperature went on increasing, the germanium which diffused into silver would separate out again. The activation energy of diffusion was estimated to be 0.15 eV by means of measuring the sheet resistance of bilayer.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=29DF2CB55EF687E7EFA80DFD4B978260&aid=267D97826BCF8298169212FEF23E1B19&yid=9C2DB0A0D5ABE6F8&vid=933658645952ED9F&iid=DF92D298D3FF1E6E&sid=9C6D270E246D943F&eid=0FBB0D015A3E9A88&journal_id=1000-3290&journal_name=物理学报&referenced_num=0&reference_num=0